The production of LED dies can require a variety of wet chemical treatments, and DuPont has put its science to work in formulating solutions for the LED industry designed to enable removal of positive- and negative-tone photoresists as well as plasma-hardened residues, and which are compatible with a wide variety of metals required to form LED contacts.
EKC® 162 Plasma and Photoresist Residue Remover – copper compatible
EKC® 162 is formulated to remove the most challenging organic- and plasma-based residues at low operating temperatures. It is water-rinsable and compatible with gallium arsenide (GaAs).
EKC® 175 Plasma and Photoresist Residue Remover – aluminum compatible
EKC® 175 provides fast and efficient removal of plasma-based residues and photoresist. It is water-rinsable.
EKC® 830 Positive Tone Photoresist Remover
EKC® 830 is a photoresist removal product specifically targeted for positive-tone photoresists. It is compatible with an exceptionally broad array of metals.
EKC® 922 Negative Tone Photoresist Remover
EKC® 922 is a photoresist removal product specifically targeted for negative-tone photoresists. It is compatible with gallium arsenide (GaAs) and an exceptionally broad array of metals.