Post Clean Treatments

Post Clean Treatments

Post clean treatments are specifically formulated for use after post etch residue or photoresist removal and prior to the DI water rinse step.

EKC4000™ PCT
EKC4000™ PCT is a cost effective replacement that outperforms conventional "rinse" chemistries such as IPA and NMP. It quickly and effectively eliminates corrosion on the wafer surface caused by drag-out (carry over) of chemistry from prior wet cleaning. EKC4000™ PCT is compatible with automatic equipment and is formulated to meet ULSI grade specifications for advanced wafer treatment. 

  

Product Information

RELATED DUPONT PRODUCTS & SERVICES

  • Post-Etch Residue Removers

    Aqueous & Semi-aqueous organic mixtures formulated to effectively remove residues from substrate surfaces after via, poly and metal etch processes.

  • Photoresist Removers

    Organic materials specifically formulated to remove positive & negative photoresist from substrate surfaces.

  • Removers for LED Fabrication

    Enable removal of positive- and negative-tone photoresists as well as plasma-hardened residues, and which are compatible with a wide variety of metals required to form LED contacts.

  • WLP Photoresist Removers & TSV Cleaners

    Formulations optimized to effectively remove thick and thin resists used for TSV masks and wafer bumping by solder electroplating or stencil printing.

  • Post-CMP Cleaners

    Aqueous formulations employed for post-CMP cleaning are designed to protect the planarized metals and dielectrics preventing metal corrosion while providing a smooth defect free wafer surface.

INFORMATION & IDEAS

  • Copper PCMP Cleaning Applications

    This single chemistry solution can be used with acidic or basic barrier slurries; provides very low defectivity on copper and low-k surfaces and more.