EKC 4000 PCT

EKC 4000 PCT

DuPont’s post-etch residue removers are aqueous and semi-aqueous organic mixtures formulated to effectively remove residues from substrate surfaces after via, poly and metal etch processes. Post-etch residue removers (PERR) are part of the core product offering from our EKC Technology portfolio.

EKC4000 PCT is a cost-effective replacement that outperforms conventional "rinse" chemistries such as IPA and NMP. It quickly and effectively eliminates corrosion on the wafer surface caused by drag-out (carry over) of chemistry from prior wet cleaning. EKC4000 PCT is compatible with automatic equipment and is formulated to meet ULSI grade specifications for advanced wafer treatment.

Solutions
  • Post-Etch Residue Removers
 
 
 

Features & benefits

  • Combines wet chemical processes
  • Compatible with automatic equipment
  • Enhanced post etch residue removal
  • Extends bath life, reduces air emissions, lowers factory operating cost
  • Formulated for optimum metal stack integrity
  • Great device reliability and product yields
  • Improves contact between metal layers
  • Industry benchmark for aluminum cleaning
  • Low evaporation rate at operating temperature
  • Low evaporation rate at operating temperature
  • Lowers via contact resistance
  • Maintains gate oxide integrity
  • Offers flexibility in process
  • Patented and patent pending improved reduction chemistry
  • Provides a safe chemical process
  • Reduces cost of ownership by simplifying process
  • Reduces equipment requirements
  • Ultra Large Scale Integration (ULSI) grade specifications for advanced wafer cleaning
  • “Improved” wide window process capability
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    Available Sizes

    Gross Weight Net Weight Carton Each Carton Length Carton Weight Carton Height
    3825 0 0 0
    3825 0 0 0
    612 0 0 0
     
     
     

    Physical Properties

    Property Value Unit Method
    Viscosity at 25 °C (cps) — (esoln-1) 25.22
    Specific Gravity (esoln-1) — (esoln-1) 1.104
    pH (esoln-2) — (esoln-1) 11.5
    Viscosity at 75 °C (cps) — (esoln-1) 10.18
    Flash Point (esoln-7) — (esoln-1) °C >110
    Boiling Point — (esoln-1) °C 100
    Solubility in Water — (esoln-1) % 100
    Freezing Point — (esoln-1) °C <0
     
     
     
    Product Details

    Fabric/material

    EKC 4000

    Design

    EKC4000 FINISHED

    Seam

    EKC4000

    Packaging

    EKC4000 FINISHED

    Hazard

    Coated Material

    OTHER/SPECIALTY REMOVERS

    Features

    OTHER

     
     
     
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    Safety Data Sheets(All Languages)
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