Post-Etch Residue Removers

 
 
 

Post-Etch Residue Removers

DuPont’s post-etch residue removers are aqueous and semi-aqueous organic mixtures formulated to effectively remove residues from substrate surfaces after via, poly and metal etch processes.

Those products are designed to clean residues created during the etch process, while keeping compatibility with exposed metal and dielectric materials. DuPont has products for Aluminum and Copper process integration. 

 
 
 
 
 
 

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