The production of LED dies can require a variety of wet chemical treatments, and DuPont has put its science to work in formulating solutions for the LED industry designed to enable removal of positive- and negative-tone photoresists as well as plasma-hardened residues, and which are compatible with a wide variety of metals required to form LED contacts.
EKC162/EKC164 Plasma and Photoresist Residue Remover – copper compatible
Formulated to remove the most challenging organic- and plasma-based residues at low operating temperatures. Water-rinsable. Compatible with gallium arsenide (GaAs).
EKC175 Plasma and Photoresist Residue Remover – aluminum compatible
Provides fast and efficient removal of plasma-basedresidues as photoresist. Water-rinsable.
EKC830 Positive Tone Photoresist Remover
Photoresist removal product specifically targeted for positive-tone photoresists. Compatible with an exceptionally broad array of metals.
EKC922 Negative Tone Photoresist Remover
Photoresist removal product specifically targeted for negative-tone photoresists. Compatible with gallium arsenide (GaAs) and an exceptionally broad array of metals.
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