Thermal Process
High-performance sealing solutions that can take the heat of semiconductor manufacturing
DuPont™ Kalrez® thermal application grades are excellent for the unique requirements of wafer processing environments.Plus, Kalrez® parts help lower operation costs.
Even at temperatures as high as 325°C, Kalrez® maintains its elastomeric properties. Kalrez® is robust enough to stand up to metal CVD (chemical vapor deposition), ALD (atomic layer deposition), and LPCVD (low pressure chemical vapor deposition) as well as oxidation and diffusion processes. This means lower costs of operation for equipment with Kalrez® seals because of extended preventive maintenance cycles.
Kalrez® is excellent for:
• Quartz chamber seals
• Fittings
• Center rings
• Plenum seals
Ideas & innovations
Powered by a broad product portfolio and state-of-the-art expertise, we help our partners meet the critical industry demands of the electrical and electronics market.
Featured Kalrez® resources
Additional links
Kalrez® Chemical Resistance Guide
Literature
Semicon Product Selector Guide