KALREZ®9100

KALREZ®9100

Kalrez® perfluoroelastomer parts provide best in class chemical resistance for exploration and production services while also meeting the industry standard requirements.

Applications
  • Chamber lid seals
  • Gas inlet/orifice seals
  • Gas valve/slit valve door seals
  • Isolation valve seals
  • Substrate handling pads
  • “Select” bonded gate valves/slit valve door seals*
 
 
 

Features & benefits

Low erosion rate and ultra-low particle generation in oxygen and fluorine-based plasmas
  • Low erosion rate and ultra-low particle generation in oxygen and fluorine-based plasmas
  • Very low outgassing properties and metals content
  • Very low outgassing properties and metals content
  • Excellent resistance to dry process chemistry
  • Excellent resistance to dry process chemistry
  • Particle Generation
  • Significantly improve wafer production. Less erosion, lower particle generation and longer seal life
  • Excellent elastic recovery and low compression set properties
  • Excellent elastic recovery and low compression set properties
  • Plasma Resistance
  • Kalrez® 9100 exhibited significantly lower weight loss (erosion)
  • Excellent thermal stability
  • Excellent thermal stability
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    Available Sizes

    Gross Weight Net Weight Carton Each Carton Length Carton Weight Carton Height
    0 0 0
    0 0 0
    0 0 0
     
     
     

    Physical Property

    Property Value Unit Method
    Hardness ASTM D2240 (Plied slab test specimens) Shore A (plied slab) 70
    ASTM D2240 & D1414 (AS568 K214 O-ring test specimens) Shore M (O-ring) 74 78
    Elongation at Break ASTM D412 (Dumbbell test specimens) % 238
    Max. Application, Temperature DuPont proprietary test method °C (°F) 300 (572)
    100% Modulus ASTM D412 (Dumbbell test specimens) MPa (psi) 5.17 (750)
    Tensile Strength at Break ASTM D412 (Dumbbell test specimens) MPa (psi) 15.67 (2273)
    Compression Set, 70 hr. at 250°C (482°F) ASTM D395B & D1414 (AS568 K214 O-ring test specimens) % 21
    Color - Amber Translucent
    Compression Set, 70 hr. at 300°C (572°F) ASTM D395B & D1414 (AS568 K214 O-ring test specimens) % 53
    Compression Set, 70 hr. at 204°C (400°F) ASTM D395B & D1414 (AS568 K214 O-ring test specimens) % 17 18
     
     
     
    Product Details

    Fabric/material

    LWO 9100

    Design

    9100

    Seam

    9100

    Packaging

    9100

    Hazard

    Coated Material

    LWO 9100

    Features

    LARGE WHITE ORING

    Color

    WHITE

     
     
     
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