DuPont™ Kalrez® materials have excellent thermal stability and have been specially formulated and processed to meet the unique requirements of wafer processing environments. Plus, Kalrez® parts help lower operation costs.
Even at temperatures as high as 325°C, Kalrez® maintains its elastomeric properties. Kalrez® is robust enough to stand up to metal CVD (chemical vapor deposition), ALD (atomic layer deposition), and LPCVD (low pressure chemical vapor deposition) as well as oxidation and diffusion processes. This means lower costs of operation for equipment with Kalrez® seals because of extended preventive maintenance cycles.
Kalrez® is excellent for:
• Quartz chamber seals
• Center rings
• Plenum seals