AR™ 137 is an organic bottom anti-reflectant coating (oBARC) for immersion lithography. It is designed to provide excellent optical parameters to minimize reflection through angles for hyper numerical aperture (NA) immersion exposure.
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| Gross Weight | Net Weight | Carton Each | Carton Length | Carton Weight | Carton Height |
|---|---|---|---|---|---|
| 757 | 0 | 0 | 0 |
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Fabric/material |
ARCS |
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Design |
AR137-230 |
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Seam |
AR137-230 193nm POSITIVE PHOTORESIST |
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Packaging |
ARCS |
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Hazard |
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Coated Material |
ARCS |
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Features |
ARCS |