DuPont’s post-etch residue removers are aqueous and semi-aqueous organic mixtures formulated to effectively remove residues from substrate surfaces after via, poly and metal etch processes. Post-etch residue removers (PERR) are part of the core product offering from our EKC Technology portfolio.
EKC4000 PCT is a cost-effective replacement that outperforms conventional "rinse" chemistries such as IPA and NMP. It quickly and effectively eliminates corrosion on the wafer surface caused by drag-out (carry over) of chemistry from prior wet cleaning. EKC4000 PCT is compatible with automatic equipment and is formulated to meet ULSI grade specifications for advanced wafer treatment.
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Gross Weight | Net Weight | Carton Each | Carton Length | Carton Weight | Carton Height |
---|---|---|---|---|---|
3825 | 0 | 0 | 0 | ||
3825 | 0 | 0 | 0 | ||
612 | 0 | 0 | 0 |
Property | Value | Unit | Method |
---|---|---|---|
Viscosity at 25 °C (cps) | — (esoln-1) | — | 25.22 |
Specific Gravity (esoln-1) | — (esoln-1) | — | 1.104 |
pH (esoln-2) | — (esoln-1) | — | 11.5 |
Viscosity at 75 °C (cps) | — (esoln-1) | — | 10.18 |
Flash Point (esoln-7) | — (esoln-1) | °C | >110 |
Boiling Point | — (esoln-1) | °C | 100 |
Solubility in Water | — (esoln-1) | % | 100 |
Freezing Point | — (esoln-1) | °C | <0 |
Fabric/material |
EKC 4000 |
---|---|
Design |
EKC4000 FINISHED |
Seam |
EKC4000 |
Packaging |
EKC4000 FINISHED |
Hazard |
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Coated Material |
OTHER/SPECIALTY REMOVERS |
Features |
OTHER |