EKC Photoresist & Residue Removers

Post-Etch Residue Removers

 
 
 

Post-etch Residue Removers

DuPont’s post-etch residue removers are aqueous and semi-aqueous organic mixtures formulated to effectively remove residues from substrate surfaces after via, poly and metal etch processes. Post-etch residue removers are part of our EKC Technology portfolio.

Post-etch residue removers portfolio:

PlasmaSolv® Products - HDA® Technology

PlasmaSolv® products are designed to remove post etch residue. These products perform at low operating temperatures, well below the flashpoint of the chemistry, providing a safe chemical process as well as extending bath life.

EKC245™
EKC245™ is specifically designed to clean post-etch residues generated during the volume production of high capacity DRAM devices. It is also used to clean HBr-etched polysilicon and is able to remove residues after metal etch.

EKC265™
EKC265™ was the initial product in the PlasmaSolv® series formulated to remove photoresist residue generated after etch processes. It is effective with or without oxygen ash processing.

EKC270™
EKC270™ is a post-etch residue remover with improved Ti compatibility. It is formulated to remove ashed photoresist residue, organic polymer, and organometallic etch residue while maintaining optimum metal stack integrity.

EKC270™-T
EKC270™-T is an aqueous/organic mixture designed to remove post-etch or post-ash residues on conventional Al/Cu interconnect designs.

Copper Integration Technology

CuSolve™ products are copper compatible cleaning products formulated specifically for advanced designs integrating copper. These products remove photoresist and copper containing residues in the presence of exposed copper and low-k materials.

SAC™ (Semi-Aqueous Chemistry) Remover

The SAC™ (semi-aqueous chemistry) series of products comprise the industry’s most effective solution to the cleaning of etch residue at or below critical dimensions of 0.25µm. Used at ambient temperature for short process times, SAC™ products eliminate W plug failures and facilitate advanced interconnect by complete cleaning of both subtractive etch and damascene structures.

EKC652™ SAC™
EKC652™ is a semi-aqueous formulation that removes post-etch residue quickly and effectively from substrates containing traditional integration materials.

Photoresist & Residue Removers

  • Post-Etch Residue Removers

    Post-Etch Residue Removers

    Aqueous & semi-aqueous organic mixtures formulated to effectively remove residues from substrate surfaces after via, poly and metal etch processes.

  • Post-Clean Treatments

    Post-Clean Treatments

    Post-Clean treatments are specifically formulated for use after post etch residue or photoresist removal and prior to the DI water rinse step.

    View Details
  • Post-CMP Cleaners

    Post-CMP Cleaners

    Aqueous formulations employed for post-CMP cleaning are designed to protect the planarized metals and dielectrics preventing metal corrosion while providing a smooth defect free wafer surface.

    View Details
  • Removers for LED Fabrication

    Removers for LED Fabrication

    Enable removal of positive- and negative-tone photoresists as well as plasma-hardened residues, and which are compatible with a wide variety of metals required to form LED contacts

    View Details
  • WLP Photoresist Removers & TSV Cleaners

    WLP Photoresist Removers & TSV Cleaners

    Formulations optimized to effectively remove thick and thin resists used for TSV masks and wafer bumping by solder electroplating or stencil printing

    View Details
  • Photoresist Removers

    Photoresist Removers

    Organic materials specifically formulated to remove positive & negative photoresist from substrate surfaces

    View Details