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Klebosol® Slurries

Klebosol® Slurries

DuPont is the exclusive provider of Klebosol® slurries. Klebosol® slurries are the most widely used water-glass colloidal silica products for CMP of semiconductor devices, interlayer dielectrics, shallow trench isolation, polysilicon, and post-metal buff. The silica particles are grown in a liquid medium and maintain excellent stability.

Applications
  • DuPont’s portfolio includes long-established mature node products using Klebosol® abrasives as well as ultra-high purity abrasives for advanced node ILD needs.
 
 
 

Features & benefits

  • Slurries are designed to enable the planarization and material removal such that surface quality and material property integrity is maintained or improved.
  • Slurries are made up of a combination of key additives which enable precise polishing of the wafer surface. 
  • State-of-the-art polishing slurries enable topography or flatness to be maintained at or less than 300 angstroms across a 300mm wafer.
  • Surface finish of materials, including corrosion sensitive metals, is maintained at the single-digit angstrom level.
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                       ® Klebosol is a registered trademark of Merck KGaA, Darmstadt, Germany or its affiliates.

     
     
     
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