Since the earliest days of the chemical mechanical planarization (CMP) process, we’ve been providing CMP slurries to the semiconductor marketindustry. Today, the second largest volume supplier of CMP slurries in the world, and the largest provider of CMP consumables overall, DuPont is strategically positioned to provide solutions for increasingly complex CMP process requirements.
DuPont’s slurry offerings include a broad range of dielectric and metal polishing solutions. Our ongoing investment in slurry technology includes a well-funded research and development program, an established and growing product portfolio, and a global footprint of application centers to engage directly to meet customers’ needs.
The Novaplane™ slurry platform is a family of tungsten (W) slurries with high removal rates and tunable selectivities that can provide superior topography performance, fulfill defect reduction requirements and offer low cost of ownership to meet customers’ needs in tungsten CMP polishing.
The Optiplane™ slurry platform is a family of advanced dielectric, nitride and polysilicon slurries with tunable removal rates and selectivities that can meet defect reduction requirements and tighter specifications at a competitive cost for manufacturing the next generation of advanced semiconductor devices.
Acuplane™ Advanced Barrier and TSV Slurries
The Acuplane™ slurry platform includes copper barrier and through silicon via (TSV) slurries with a tunable range of film selectivity. Acuplane ™ slurries demonstrates predictable performance in logic and memory integration schemes and is available in production volumes for both mature and advanced device nodes.
DuPont is the exclusive provider of Klebosol® slurries. Klebosol® slurries are the most widely used water-glass colloidal silica products for CMP of semiconductor devices, interlayer dielectrics, shallow trench isolation, polysilicon, and post-metal buff. The silica particles are grown in a liquid medium and maintain excellent stability.
Other Slurry Materials
DuPont also offers Nanopure™ slurries for silicon wafer polishing and polysilicon CMP and the ILD™ 3000-5000 series of slurries for interlayer dielectrics.
® Klebosol is a registered trademark of Merck KGaA, Darmstadt, Germany or its affiliates.
The chemical mechanical planarization (CMP) process is used to planarize both die level and wafer level topography and also to remove overfill metal and metalloid materials that serve as interconnects in an integrated circuit. CMP pads and slurries are used together in combination on a polishing tool multiple times throughout the semiconductor fabrication process.
Slurries are made up of a combination of key additives which enable precise polishing of the wafer surface. Slurries are designed to enable the planarization and material removal such that surface quality and material property integrity is maintained or improved. State-of-the-art polishing slurries enable topography or flatness to be maintained at or less than 300 angstroms across a 300mm wafer. Surface finish of materials, including corrosion sensitive metals, is maintained at the single-digit angstrom level.
DuPont also offers Nanopure™ slurries for silicon wafer polishing and the ILD™ 3000 -5000 series for interlayer dielectrics.
A range of offerings for chemical mechanical planarization (CMP) including Novaplane™, Optiplane™, Acuplane™ and Klebosol® slurries.
Broad portfolio of CMP pads to meet the needs of any application.View Details